Temperature behavior of specific contact resistance and resistivity on nitrogen implanted 6H-SiC with titanium silicide ohmic contacts

✍ Scribed by Schmid, U.; Getto, R.; Sheppard, S. T.; Wondrak, W.

• Book ID: 111909955
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 595 KB
• Volume: 85
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.369628