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TEM investigation of Co-Cr film microstructure

✍ Scribed by C. Hwang; D.E. Laughlin; P.V. Mitchell; A. Layadi; K. Mountfield; J.E. Snyder; J.O. Artman


Book ID
113313635
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
303 KB
Volume
54-57
Category
Article
ISSN
0304-8853

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## Abstract Co doped C films with different Co volume fraction __x__~v~ were fabricated using facing‐target sputtering at room temperature. The as‐deposited films are composed of ∼2 nm amorphous Co granules dispersed in a‐C matrix, and their morphology is composition independent. The graphitized ca