✦ LIBER ✦

Techniques for dose matching between ion implanters

✍ Scribed by P. Lundquist; S. Mehta; T. Black; D. Jackson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A new dose control technique for ion imp

✍ G. Ryding; M. Farley 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 901 KB

Ion dose uniformity for planar sample pl

✍ Dixon Tat-Kun Kwok; Chu, P.K.; Chung Chan 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 742 KB

Absorbed dose determination for tomograp

✍ Denise K. Kassebaum; Norman E. Stoller; William D. McDavid; Bruce Goshorn; Charl 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 859 KB

Determination of doses for ion implantat

✍ Jouve, H.; Gailliard, J.; Piaguet, J. 📂 Article 📅 1975 🏛 IEEE 🌐 English ⚖ 252 KB

A comparison of batch and single wafer h

✍ R.B. Irwin; A.J. Filo; V.C. Kannan; A. Feygenson; R.J. Prematta 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 391 KB

The modeling of ion implantation in a th

✍ Amaratunga, G.A.J.; Sabine, K.; Evans, A.G.R. 📂 Article 📅 1985 🏛 IEEE 🌐 English ⚖ 263 KB