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Technique for the growth of metal coatings by ion implantation

✍ Scribed by S.N. Bunker; A.J. Armini


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
704 KB
Volume
66
Category
Article
ISSN
0257-8972

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## Abstract Here, the use of low‐energy metal ion implantation by filtered cathodic vacuum arc to create highly deformable electrodes on polydimethylsiloxane (PDMS) membranes is reported. Implantation leads to the creation of nanometer‐size clusters in the first 50 nm below the surface. When the el