Technical note: Cryogenic vacuum pump characteristics in reactive d.c. magnetron sputtering processes

✍ Scribed by K.A. Taylor; C.T. Wan; G.T. Susi; D.L. Chambers

• Book ID: 107929987
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 833 KB
• Volume: 33
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(87)90203-9