✦ LIBER ✦
Technical note: Comparison of film density, stoichiometry, optical and electrical properties of thin metal oxide films produced by reactive d.c. magnetron sputtering and electron beam evaporation techniques
✍ Scribed by B.P. Hichwa; G. Caskey
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 450 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0257-8972
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