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Target voltage behaviour of a vanadium-oxide thin film during reactive magnetron sputtering

✍ Scribed by Wang, Tao; Jiang, Ya-Dong; Yu, He; Wu, Zhi-Ming; Zhao, He-Nan


Book ID
121447360
Publisher
IOP Publishing
Year
2011
Tongue
English
Weight
461 KB
Volume
20
Category
Article
ISSN
1674-1056

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