TRIDYN simulation of target poisoning in
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D. RosΓ©n; I. Katardjiev; S. Berg; W. MΓΆller
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Article
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2005
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Elsevier Science
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English
β 140 KB
During reactive sputter deposition, target ''poisoning'', i.e. the formation of a compound layer at the target surface, may reduce the sputter erosion rate substantially and thereby represent a major limitation to achieve high deposition rates. In order to investigate the formation of the poisoned l