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Tantalum oxide film formation by excimer laser ablation

✍ Scribed by Yukio Nishimura; Hiroki Ujita; Masaharu Tsuji

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 701 KB
Volume: 89
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00041-0

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