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Ta2O5 thin-films deposited by off-axis and on-axis pulsed laser deposition techniques

โœ Scribed by N. Inoue; T. Ninomiya; S. Kashiwabara; R. Fujimoto


Publisher
Springer
Year
1999
Tongue
English
Weight
142 KB
Volume
69
Category
Article
ISSN
1432-0630

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