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System integration of high voltage electrostatic MEMS actuators

✍ Scribed by Jean-François Saheb; Jean-François Richard; Mohamad Sawan; Remi Meingan; Yvon Savaria

Book ID
106342328
Publisher
Springer
Year
2007
Tongue
English
Weight
640 KB
Volume
53
Category
Article
ISSN
0925-1030

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Devices and circuits capable of high-voltage operation are necessary for the actuation of micromachined electrostatic structures that require high voltages (20-100 V). These high-voltage devices have traditionally been fabricated using specialized processes. Monolithic integration of the actuators w