✦ LIBER ✦
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
✍ Scribed by Chuan Pu; Sangtae Park; Chu, P.B.; Shi-Sheng Lee; Ming Tsai; Peale, D.; Bonadeo, N.H.; Brener, I.
- Book ID
- 114569828
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 293 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1077-260X
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