Synthesis of silicon-based polymer films by excimer laser-induced photo-reaction of phenylsilane and methylphenylsilane

✍ Scribed by Masaaki Suzuki; Okio Nishimura; Hideaki Nagai; Yoshinori Nakata; Takeshi Okutani

• Book ID: 101276114
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 65 KB
• Volume: 14
• Category: Article
• ISSN: 0268-2605
• DOI: 10.1002/(sici)1099-0739(200006)14:6<325::aid-aoc993>3.0.co;2-n

✦ Synopsis

The synthesis of silicon-based polymer films was studied by excimer laser (248 nm)-induced photo-reaction of phenylsilane and methylphenylsilane at reduced pressure. IR and UV-VIS results showed that the films were composed of Si-C network structures with phenyl rings.