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Synthesis of silicon and silicon nitride powders by vapour-phase reactions

✍ Scribed by B. W. Jong; G. J. Slavens; D. E. Traut

Publisher: Springer
Year: 1992
Tongue: English
Weight: 431 KB
Volume: 27
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf01133754

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