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Synthesis of SiC powder by RF plasma technique

✍ Scribed by Z. Károly; I. Mohai; Sz. Klébert; A. Keszler; I.E. Sajó; J. Szépvölgyi


Book ID
113860941
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
663 KB
Volume
214
Category
Article
ISSN
0032-5910

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RF plasma synthesis of amorphous AIN pow
✍ M. David; S. V. Babu; D. H. Rasmussen 📂 Article 📅 1990 🏛 American Institute of Chemical Engineers 🌐 English ⚖ 673 KB

## RF Plasma Synthesis of Amorphous AIN Powder and Films Amorphous powder and thin films of aluminum nitride (AIN) are deposited in a parallel-plate RF plasma reactor starting from trimethylaluminum (TMA) and ammonia. Film deposition is favored at lower pressures and NH,/TMA ratios; particle depos