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Synthesis of periodic plasmonic microstructures with copper nanoparticles in silica glass by low-energy ion implantation

✍ Scribed by Stepanov, A. L.; Galyautdinov, M. F.; Evlyukhin, A. B.; Nuzhdin, V. I.; Valeev, V. F.; Osin, Y. N.; Evlyukhin, E. A.; Kiyan, R.; Kavetskyy, T. S.; Chichkov, B. N.

Book ID: 120007390
Publisher: Springer
Year: 2012
Tongue: English
Weight: 565 KB
Volume: 111
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-012-7474-5

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## Abstract We propose an original approach called “stencil‐masked ion implantation process” to perform a spatially localized synthesis of a limited number of Si nanoparticles (nps) within a thin SiO~2~ layer. This process consists in implanting silicon ions at ultra‐low energy through a stencil ma