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Synthesis of nano-sized SiC precipitates in Si by simultaneous dual-beam implantation of C+and Si+ions

✍ Scribed by R. Kögler; F. Eichhorn; J.R. Kaschny; A. Mücklich; H. Reuther; W. Skorupa; C. Serre; A. Perez-Rodriguez

No coin nor oath required. For personal study only.

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