Synthesis of epitaxial Pt on (100)Si using TiN buffer layer by pulsed laser deposition

✍ Scribed by Tiwari, P.; Wu, X. D.; Foltyn, S. R.; Jia, Q. X.; Campbell, I. H.; Arendt, P. A.; Muenchausen, R. E.; Peterson, D. E.; Mitchell, T. E.; Narayan, J.

• Book ID: 115481134
• Publisher: American Institute of Physics
• Year: 1994
• Tongue: English
• Weight: 589 KB
• Volume: 65
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.112608