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Synthesis of crystallized TaON and Ta3N5 by nitridation of Ta2O5 thin films grown by pulsed laser deposition

✍ Scribed by M. Kerlau; O. Merdrignac-Conanec; M. Guilloux-Viry; A. Perrin

No coin nor oath required. For personal study only.

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## Abstract For Abstract see ChemInform Abstract in Full Text.

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