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Synthesis of c-BN films by using a low-pressure inductively coupled BF3–He–N2–H2 plasma

✍ Scribed by Yamamoto, H.; Matsumoto, S.; Okada, K.; Yu, J.; Hirakuri, K.

Book ID
122249547
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
344 KB
Volume
15
Category
Article
ISSN
0925-9635

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## Abstract Boron nitride (BN) films with high crystallinity and phase purity (>80 %) in the cubic phase were synthesized over large areas using fluorine chemistry and electron–cyclotron resonance (ECR) microwave plasma. Plasma‐enhanced fluorine chemistry was provided by a complex H~2~–BF~3~–N~2~–A