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Synthesis of alicyclic polymers and characterization of chemical amplified positive photoresists having the same

✍ Scribed by Jui-Hsiang Liu; Ching-Dong Hsieh; Chun-Chieh Tseng

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 179 KB
Volume: 96
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.21324

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