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Preparation and Characterization of Novel Polymers Having Pendant Ketal Moieties for Positive Photoresists

✍ Scribed by Jui-Hsiang Liu; Jen-Chieh Shih

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 114 KB
Volume: 202
Category: Article
ISSN: 1022-1352
DOI: 10.1002/1521-3935(20011001)202:15<2986::aid-macp2986>3.0.co;2-r

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