✦ LIBER ✦

Synthesis, characterization, and properties of a novel positive photoresist polyimide

✍ Scribed by Bang-chein Ho; Jian-hong Chen; Wen-chung Perng; Chin-lung Lin; Li-mei Chen

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 171 KB
Volume: 67
Category: Article
ISSN: 0021-8995
DOI: 10.1002/(sici)1097-4628(19980214)67:7<1313::aid-app22>3.0.co;2-0

No coin nor oath required. For personal study only.

✦ Synopsis

An aqueous base-soluble polyimide (BAPAF/6FDA) was obtained from the polycondensation of 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane (BAPAF) and 4,4 -(hexafluoroisopropylidene) -bis(phthalic anhydride (6FDA). It exhibits high thermal stability and high transparency at 365 nm. A novel positive photoresist was prepared by protecting BAPAF/6FDA with a trimethylsilyl group while using diazonaphthoquinone as the photosensitizer. In addition, the silylated polyimide was converted to aqueouse base-soluble polyimide in the presence of an acid and a slight amount of water. This photoresist yields a sensitivity of 110 mJ/cm 2 and a contrast of 3.24.

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