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Synthesis and electrochemical characteristics of Ta–N thin films fabricated by cathodic arc deposition

✍ Scribed by Li Li; Erwu Niu; Guohua Lv; Xianhui Zhang; Huan Chen; Songhua Fan; Chizi Liu; Si-Ze Yang

Book ID: 108060188
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 745 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.01.128

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