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Synthesis and characterization of Y2O3nanoparticles and nanorods in magnetron sputtered Ti-Y alloy films

✍ Scribed by Zhang, Jinchao; Li, Xiongwei; Wang, Yongli; Liu, Shi


Book ID
118782240
Publisher
Springer
Year
2012
Tongue
English
Weight
678 KB
Volume
110
Category
Article
ISSN
1432-0630

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Growth and characterization of Y2O3 thin
✍ Xuerui Cheng; Zeming Qi; Guobin Zhang; Hongjun Zhou; Weiping Zhang; Min Yin πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 266 KB

Y 2 O 3 thin films were grown on silicon (1 0 0) substrates by pulsed-laser deposition at different substrate temperatures and O 2 pressures. The structure and composition of films are studied by using X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The Y 2 O 3 thin films deposit