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Synthesis and characterization of Ti-Si-C-N films

✍ Scribed by D. V. Shtansky; E. A. Levashov; A. N. Sheveiko; J. J. Moore

Publisher: The Minerals, Metals & Materials Society
Year: 1999
Tongue: English
Weight: 680 KB
Volume: 30
Category: Article
ISSN: 1073-5623
DOI: 10.1007/s11661-999-0252-0

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