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Ion-assisted deposition of CN and SiCN films

✍ Scribed by Zhigang He; George Carter; John S Colligon

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 562 KB
Volume: 283
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08556-2

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