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Synthesis and characterization of phosphorus-doped ZnO and (Zn,Mg)O thin films via pulsed laser deposition

✍ Scribed by Y. J. Li; Y. W. Heo; J. M. Erie; H. Kim; K. Ip; S. J. Pearton; D. P. Norton


Book ID
107453605
Publisher
Springer US
Year
2006
Tongue
English
Weight
247 KB
Volume
35
Category
Article
ISSN
0361-5235

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## Abstract Sn:ZnO thin films with different Sn concentrations were grown by pulsed laser deposition (PLD) onto single‐crystal Si(001) substrates at an oxygen pressure of 2 Γ— 10^–2^ mbar and substrate temperature of 600 Β°C. The targets used were high density Sn:ZnO pellets with different Sn concent