## Abstract The carbonβrich hydrogenated amorphous silicon carbide (aβSi~1β__x__~C~__x__~:H) films were deposited by plasma enhanced chemical vapor deposition using silane (diluted to 10% in hydrogen) and ethylene as the gas sources. To observe surface enhanced Raman scattering (SERS), some samples
β¦ LIBER β¦
Synthesis and characterization of hydrogenated amorphous silicon-carbon films with blue-green emission
β Scribed by Yuehui Yu; Zhaocu Wu; Zhongxin Ren; Xianghuai Liu; Shichang Zou; S.P. Wong; I.H. Wilson
- Book ID
- 114168820
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 358 KB
- Volume
- 127-128
- Category
- Article
- ISSN
- 0168-583X
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