Synthesis and Characterization of Fluorinated Aminoalkoxide and Iminoalkoxide Gallium Complexes: Application in Chemical Vapor Deposition of Ga 2 O 3 Thin Films

✍ Scribed by Chi, Yun; Chou, Tsung-Yi; Wang, Yi-Jen; Huang, Shu-Fen; Carty, Arthur J.; Scoles, Ludmila; Udachin, Konstantin A.; Peng, Shie-Ming; Lee, Gene-Hsiang

• Book ID: 126429177
• Publisher: American Chemical Society
• Year: 2004
• Tongue: English
• Weight: 229 KB
• Volume: 23
• Category: Article
• ISSN: 0276-7333
• DOI: 10.1021/om034148d