New Tungsten(VI) Guanidinato Complexes: Synthesis, Characterization, and Application in Metal−Organic Chemical Vapor Deposition of Tungsten Nitride Thin Films

✍ Scribed by Rische, Daniel; Parala, Harish; Gemel, Eliza; Winter, Manuela; Fischer, Roland A.

• Book ID: 127142077
• Publisher: American Chemical Society
• Year: 2006
• Tongue: English
• Weight: 557 KB
• Volume: 18
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm061999d