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Synthesis and characterization of aligned Fe-filled carbon nanotubes on silicon substrates

✍ Scribed by R. Kozhuharova; M. Ritschel; D. Elefant; A. Graff; A. Leonhardt; I. Mönch; T. Mühl; C. M. Schneider

Book ID
111556754
Publisher
Springer US
Year
2003
Tongue
English
Weight
423 KB
Volume
14
Category
Article
ISSN
0957-4522

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We have achieved selective growth of high-purity carbon nanotubes (CNTs) on iron-deposited hole-patterns by thermal chemical vapor deposition (CVD) of acetylene gas. The vertically well-aligned CNTs were uniformly synthesized with good selectivity on hole-patterned silicon substrates. The CNTs indic