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Synthesis and characterization of a novel precursor for thin films of zinc oxide by SSCVD

✍ Scribed by L.P. Dai; H. Deng; G. Chen; M. Wei; Y. Li


Book ID
113790744
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
430 KB
Volume
61
Category
Article
ISSN
0167-577X

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Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~