Syntheses in a low power microwave discharge II: Amorphous silicon nitride and polycrystalline silicon

✍ Scribed by P.M. Jeffers; S.H. Bauer

• Book ID: 118332200
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 197 KB
• Volume: 57
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(83)90421-0