Synchrotron X-radiation plane-wave topography for imaging microdefects in thinned silicon crystals

✍ Scribed by Yoshinori Chikaura; Masato Imai; Yoshifumi Suzuki; Yoshifumi Yatsurugi

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 890 KB
• Volume: 103
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(90)90182-k