✦ LIBER ✦

Synchrotron-based X-ray lithography at Stanford University

✍ Scribed by L. Pan; P.L. King; P. Pianetta; D. Seligson; T.W. Barbee Jr.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Design considerations for the X-ray lith

✍ P. Pianetta; R. Tatchyn; R. Jaeger; T.W. Barbee Jr. 📂 Article 📅 1984 🏛 Elsevier Science ⚖ 331 KB

Application of X-ray steppers using opti

✍ H. Huber; U. Scheunemann; W. Rohrmoser; E. Cullmann 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 239 KB

A MOSFET, manufactured with synchrotron

✍ J. Hersener; G. Lässing 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 534 KB

Soft X-ray microscopy and lithography wi

✍ Wolfgang Gudat 📂 Article 📅 1978 🏛 Elsevier Science ⚖ 994 KB

A general purpose sub-keV X-ray facility

✍ K.Glenn Tirsell; Victor P. Karpenko 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 522 KB

X-ray lithography beamlines at Aladdin

✍ G.M. Wells; B. Lai; D. So; R. Redaelli; F. Cerrina 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 731 KB