✦ LIBER ✦

X-ray lithography beamlines at Aladdin

✍ Scribed by G.M. Wells; B. Lai; D. So; R. Redaelli; F. Cerrina

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Novel beamline optics for x-ray lithogra

✍ R.K. Cole; F. Cerrina 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 277 KB

Applications of faceted mirrors to X-ray

✍ Guan-Jye Chen; J.Z.Y. Guo; F. Cerrina 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 468 KB

Beamlines for thin and thick resist X-ra

✍ Glen H. Dahlbacka; Jorge Pearce; Francis Younger 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 617 KB

Soft X-ray dosimetry and its application

✍ Daniel Seligson; Lawrence Pan; Paul King; Piero Pianetta 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 553 KB

The center for X-ray lithography facilit

✍ G.M. Wells; E.L. Brodsky; M. Reilly; J.W. Taylor; F. Cerrina 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 386 KB

Low cost ESR based X-ray beamline for li

✍ S. Kovacs; A. Doumas; M. Truncale 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 472 KB