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Swift heavy ion induced modifications of silicon (sub) oxide nitride layer structures

✍ Scribed by W.M. Arnoldbik; F.H.P.M. Habraken

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 172 KB
Volume: 256
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.017

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