𝔖 Bobbio Scriptorium
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Survey on iterative learning control, repetitive control, and run-to-run control

✍ Scribed by Youqing Wang; Furong Gao; Francis J. Doyle III


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
743 KB
Volume
19
Category
Article
ISSN
0959-1524

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In semiconductor manufacturing it is useful to design control charts to be sensitive to anticipated assignable causes. Process knowledge can be used to develop summaries for run-to-run control that are more sensitive to problems than traditional approaches. As the number of measurements recorded fro