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Surface treatments for pistons and their effect on engine performance

โœ Scribed by S. Venkatesh


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
574 KB
Volume
25
Category
Article
ISSN
0043-1648

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The effect of the type of capping layer and post-CMP surface treatments on the adhesion between damascene Cu and the capping layer was investigated. The CMPed-surface was treated by six methods divided into four groups which consisted of no surface treatment, cleaning by plasma with vacuum break, cl