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Surface Texturing of Ga-Doped ZnO Thin Films by Pulsed Direct-Current Magnetron Sputtering for Photovoltaic Applications

✍ Scribed by Y. C. Lin; W. T. Yen; C. H. Shen; P. C. Yao


Book ID
107457422
Publisher
Springer US
Year
2011
Tongue
English
Weight
1021 KB
Volume
41
Category
Article
ISSN
0361-5235

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## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indium‐tin‐oxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thin‐film preparation techni