Optimization of aluminum-doped ZnO thin-
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Minami, Tadatsugu ;Miyata, Toshihiro ;Ohtani, Yuusuke
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Article
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2007
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John Wiley and Sons
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English
β 236 KB
## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indiumβtinβoxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thinβfilm preparation techni