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Surface roughening of diamond (001) films during homoepitaxial growth in heavy boron doping

✍ Scribed by Tokuda, Norio; Umezawa, Hitoshi; Saito, Takeyasu; Yamabe, Kikuo; Okushi, Hideyo; Yamasaki, Satoshi

Book ID: 121943041
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 686 KB
Volume: 16
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2006.12.024

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## Abstract As‐grown (100) homoepitaxial diamond films with boron concentrations [B] from 4.6 × 10^16^ to 1.5 × 10^21^ cm^–3^ have been analysed using X‐ray photoelectron spectroscopy (XPS). Their C 1s core levels contain a dominant component around 284.17 ± 0.2 eV ascribed to sp^3^ C and a main se