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Surface-plasmon-assisted nanoscale photolithography by polarized light

✍ Scribed by Shao, D. B.; Chen, S. C.

Book ID: 120530768
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 642 KB
Volume: 86
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1951052

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