248 nm imaging photolithography assisted by surface plasmon polariton interference

✍ Scribed by Tian, Man-man; Mi, Jia-jia; Shi, Jian-ping; Wei, Nan-nan; Zhan, Ling-li; Huang, Wan-xia; Zuo, Ze-wen; Wang, Chang-tao; Luo, Xian-gang

• Book ID: 121582496
• Publisher: Tianjin University of Technology
• Year: 2014
• Tongue: English
• Weight: 228 KB
• Volume: 10
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-014-3172-1