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Surface Passivation of Silicon by Electrochemically Formed Oxide Layers

✍ Scribed by E. Neburchilova; A. Osipov; L. Rubin; T. Wardle; W. Zhu

Book ID: 116427179
Publisher: Elsevier
Year: 2012
Weight: 574 KB
Volume: 27
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2012.07.079

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