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Surface Passivation Effect of Silicon Substrates due to Quinhydrone/Ethanol Treatment

โœ Scribed by Takato, Hidetaka; Sakata, Isao; Shimokawa, Ryuichi

Book ID
115549054
Publisher
Institute of Pure and Applied Physics
Year
2001
Tongue
English
Weight
41 KB
Volume
40
Category
Article
ISSN
0021-4922

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## Abstract Hydrogenโ€terminated silicon substrates were passivated with quinhydroneโ€“methanol (QHY/ME) and iodineโ€“methanol (I~2~/ME), and the chemical changes occurring at the surface were investigated using Xโ€ray photoelectron spectroscopy (XPS). The XPS surface studies demonstrate that QHY/ME pass