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Surface mechanical property assessment of ultra-thin HfO2 films

✍ Scribed by Fu, Wei-En; He, Bo-Ching; Chang, Yong-Qing

Book ID: 122548432
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 971 KB
Volume: 544
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.03.117

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