๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Structural, morphological, optical and photoluminescence properties of HfO2 thin films

โœ Scribed by Ma, C.Y.; Wang, W.J.; Wang, J.; Miao, C.Y.; Li, S.L.; Zhang, Q.Y.

Book ID
122685213
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
962 KB
Volume
545
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Structure and optical properties of HfO2
Structure and optical properties of HfO2 thin films on silicon after rapid thermal annealing
โœ Tingting Tan; Zhengtang Liu; Hongcheng Lu; Wenting Liu; Hao Tian ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 231 KB

HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and