๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Influence of deposition temperature on the structure and optical properties of HfO2 thin films

โœ Scribed by Ni, Jie ;Li, Zheng-cao ;Zhang, Zheng-jun

Book ID
107476274
Publisher
Higher Education Press and Springer
Year
2008
Tongue
English
Weight
366 KB
Volume
2
Category
Article
ISSN
1673-7377

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Structure and optical properties of HfO2
Structure and optical properties of HfO2 thin films on silicon after rapid thermal annealing
โœ Tingting Tan; Zhengtang Liu; Hongcheng Lu; Wenting Liu; Hao Tian ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 231 KB

HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and