✦ LIBER ✦

Surface matching method for profile inspection with touch probe

✍ Scribed by Yuqing Chen; Zi Ma; Yuan Tian; Jialu Du

Book ID: 107504911
Publisher: South China University of Technology and Academy of Mathematics and Systems Science, CAS
Year: 2011
Tongue: English
Weight: 296 KB
Volume: 9
Category: Article
ISSN: 1672-6340
DOI: 10.1007/s11768-011-8234-3

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